TABLE OF CONTENTS
1. UNPACKING THE GFM MASS FLOW METER.........................................
1.1 Inspect Package for External Damage.................................................
1.2 Unpack the Mass Flow Meter...............................................................
1.3 Returning Merchandise for Repair.......................................................
2. INSTALLATION........................................................................................
2.1 Primary Gas Connections.................................................................
2.2 Electrical Connections......................................................................
2.3.1 Remote LCD Readouts.....................................................................
2.3.2 Panel Mounting Readouts................................................................
3. PRINCIPLE OF OPERATION...................................................................
4. SPECIFICATIONS...................................................................................
4.1 CE Compliance.................................................................................
5. OPERATING INSTRUCTIONS..................................................................
5.1 Preparation and Warm Up..................................................................
5.2 Flow Signal Output Readings..........................................................
5.3 Swamping Condition.......................................................................
6. MAINTENANCE.........................................................................................
6.1 Introduction......................................................................................
6.2 Flow Path Cleaning...........................................................................
6.2.1 Restrictor Flow Element (RFE)........................................................
6.2.2 GFM 17 models................................................................................
7. CALIBRATION PROCEDURES.................................................................
7.1 Flow Calibration...............................................................................
7.2 Calibration of GM Mass Flow Meters..............................................
7.2.1 Connections and Initial Warm Up.....................................................
7.2.2 ZERO Adjustment.............................................................................
7.2.3 SPAN Adjustment............................................................................
7.3 Linearity Adjustment..........................................................................
7.3.1 Connections and Initial Warm Up....................................................
7.3.2 ZERO Adjustment.............................................................................
7.3.3 25% Flow Adjustment......................................................................
7.3.4 50% Flow Adjustment......................................................................
7.3.5 75% Flow Adjustment......................................................................
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